High precision 5-Axis non-contact metrology system
OptiPro Non-Contact Metrology System "UltraSurf 5X"
Feature
All axes are made of the highest quality air bearings and linear motor technology available. A variety of probe options allow for sub-micron single and dual surface scanning of precision optical components.
OptiPro's innovative software provides comprehensive contour analysis,
coordinate control features and surface texture analysis for roughness
and p-v waviness profiles.
ASCII data export provides a seamless integration to standard optical fabrication
platforms.
Current Measurement Abilities
- Rotationally Symmetric
- Sphere, Hemisphere, Asphere, Ogive
- 4 total axes of movement, 1 during data collection
- 2-Dimensional X-Y
- B-Axis can move probe to keep normal
- 3 total axes of movement, 1 during data collection
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 |
| Ogive Inside Figure Error | Ogive Outside Figure Error |
Specification
UltraSurf 5X 100| Axis | X,Y,Z | B | C |
| Travel | 100mm | 360° | 360° |
| Resolution | 5nm | 0.274sec | 0.274sec |
| Max. Velocity | 30mm/s | 6RPM | 6RPM |
UltraSurf 5X 200
| Axis | X,Y,Z | B | C |
| Travel | 200mm | 360° | 360° |
| Resolution | 5nm | 0.274sec | 0.274sec |
| Max. Velocity | 30mm/s | 6RPM | 6RPM |